Title :
Thermal Excitation and Piezoresistive Detection of Cantilever In-Plane Resonance Modes for Sensing Applications
Author :
Beardslee, Luke Armitage ; Addous, Assim M. ; Heinrich, Stephen ; Josse, Fabien ; Dufour, Isabelle ; Brand, Oliver
Author_Institution :
Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
Abstract :
Thermally excited and piezoresistively detected bulk-micromachined cantilevers vibrating in their in-plane flexural resonance mode are presented. By shearing the surrounding fluid rather than exerting normal stress on it, the in-plane mode cantilevers exhibit reduced added fluid mass effects and improved quality factors in a fluid environment. In this letter, different cantilever geometries with in-plane resonance frequencies from 50 kHz to 2.2 MHz have been tested, with quality factors as high as 4200 in air and 67 in water.
Keywords :
Q-factor; microsensors; piezoresistive devices; bulk-micromachined cantilevers; cantilever geometries; cantilever in-plane resonance modes; frequency 50 kHz to 2.2 MHz; normal stress; piezoresistive detection; quality factors; sensing applications; thermal excitation; Cantilever; liquid operation; piezoresistive detection; resonant sensor;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2010.2052093
