Title :
A Foldable Microplasma-Generation Device on a Paper Substrate
Author :
Hsu, Cheng-che ; Tsai, Jheng-Han ; Yang, Yao-Jhen ; Liao, Ying-Chih ; Lu, Yen-wen
Author_Institution :
Dept. of Chem. Eng., Nat. Taiwan Univ., Taipei, Taiwan
Abstract :
We report the fabrication of a plasma-generating device on a paper substrate. This device was fabricated using a screen print process. Plasmas were ignited between two parallel electrodes with a plasma gap of 237 to 710 μm using a dc power source. We demonstrated that a stable helium plasma can be sustained when the substrate is flat, rolled, and folded along various orientations. When the plasma was ignited with a 0.2-μL salt solution droplet with 1.4, 4.6, and 7.8 ng of Li, Na, and K respectively applied to the discharge gap, clear metallic emission lines emanated from the plasma. Our result demonstrates that this paper-based plasma device can be used in analytical applications.
Keywords :
discharges (electric); helium; paper; plasma devices; plasma sources; He; analytical applications; dc power source; discharge gap; foldable microplasma-generation device; ignition; mass 1.4 ng; mass 4.6 ng; mass 7.8 ng; metallic emission lines; paper substrate; paper-based plasma device; parallel electrodes; plasma gap; plasma-generating device fabrication; salt solution droplet; screen print process; stable helium plasma; Discharges; Electrodes; Fault location; Helium; Plasmas; Substrates; Foldable; metal detection; microplasma; paper;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2012.2196495