Title :
Variable frequency microwave curing of photosensitive polyimides
Author :
Famsworth, K.D. ; Manépalli, Rahul N. ; Bidstrup-Allen, Sue Ann ; Kohl, Paul A.
Author_Institution :
Sch. of Chem. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
fDate :
9/1/2001 12:00:00 AM
Abstract :
Variable frequency microwave (VFM) curing was investigated as a means of rapid curing of two photosensitive polyimides. The properties of two polymers, PI 2734 and Ultradel 7501, cured by convective heating and VFM curing were compared. The results of this study indicate that rapid VFM curing of these polymers is feasible. Complete imidization was possible. The most significant differences in properties between VFM and thermally cured films were in the electrical properties due to the slow evolution of chemical products
Keywords :
dielectric thin films; microwave heating; polymer films; PI 2734; Ultradel 7501; dielectric thin films; electrical properties; imidization; photosensitive polyimides; variable frequency microwave curing; Chemicals; Curing; Dielectric substrates; Electromagnetic heating; Frequency; Manufacturing; Optical films; Polyimides; Polymer films; Semiconductor films;
Journal_Title :
Components and Packaging Technologies, IEEE Transactions on
DOI :
10.1109/6144.946496
