Recent advances in MEMS sensor technology—thermo-fluid and electro-magnetic devices

Author

Khoshnoud, Farbod ; De Silva, Clarence W.

Volume

15

Issue

3

fYear

2012

fDate

6/1/2012 12:00:00 AM

Firstpage

16

Lastpage

20

Abstract

This is the final part of a three-part series on micro-electromechanical systems (MEMS) sensor technology. In the first part, a general introduction to MEMS sensing was given including the underlying principles [1]. Biomedical MEMS sensors were described and the principles of bio-sensing in a typical set of biologically inspired sensors were presented. The second part discussed mechanical sensors and their applications [2]. Some important issues of MEMS sensors were addressed, including the need to compensate for environmental effects, the Casimir effect, harvesting of energy for self-powered sensors, and the subject of sensor selection.

Keywords

Casimir effect; biosensors; electromagnetic devices; microsensors; Casimir effect; MEMS sensor technology; biologically inspired sensors; electro-magnetic devices; energy harvesting; environmental effects; thermo-fluid devices; three-part series; Biomedical measurements; Magnetic field measurement; Magnetomechanical effects; Micromechanical devices; Robot sensing systems; Stress measurement; Temperature measurement; Tutorials;

fLanguage

English

Journal_Title

Instrumentation & Measurement Magazine, IEEE

Publisher

ieee

ISSN

1094-6969

Type

jour

DOI

10.1109/MIM.2012.6204868

Filename

6204868