Title :
An integrated simulator for coupled domain problems in MEMS
Author :
Kirby, Robert M. ; Karniadakis, George Em ; Mikulchenko, Oleg ; Mayaram, Kartikeya
Author_Institution :
Div. of Appl. Math., Brown Univ., Providence, RI, USA
fDate :
9/1/2001 12:00:00 AM
Abstract :
An integrated circuit and microfluidic simulator is presented in this paper. It allows coupled simulation of flow, structure, thermal, and electrical domains. The overall architecture and various algorithms including the coupling of the circuit and microfluidic simulators are described. An application of the simulator is demonstrated for a controlled microliquid dosing system using detailed numerical models for the fluid field, a low-dimensional model for the flow sensor, and circuit elements for the electronic control. Unlike other simulators which employ mostly lumped models for the various components, we formulate here a methodology for distributed systems
Keywords :
circuit simulation; digital simulation; flow simulation; microfluidics; micromechanical devices; numerical analysis; MEMS; controlled microliquid dosing system; coupled domain problem; distributed systems; electrical simulation; flow simulation; integrated circuit/microfluidic simulator; integrated simulator; low-dimensional model; numerical models; structure simulation; thermal simulation; Associate members; Biomembranes; Circuit simulation; Control system synthesis; Coupling circuits; Fluid flow control; Microfluidics; Micromechanical devices; Numerical models; Shape;
Journal_Title :
Microelectromechanical Systems, Journal of
