Title :
DC and low-frequency noise characteristics of SiGe p-channel FETs designed for 0.13-μm technology
Author :
Okhonin, Serguei ; Py, Marcel A. ; Georgescu, Bogdan ; Fischer, Herman ; Risch, Lothar
Author_Institution :
Inst. for Micro- and Optoelectron., Swiss Fed. Inst. of Technol., Lausanne, Switzerland
fDate :
7/1/1999 12:00:00 AM
Abstract :
The impact of hole confinement on the DC and low frequency noise in SiGe p-channel FETs is investigated by comparison with Si p-FETs produced by the same technology. The relative spectral power density of low frequency (1/f) noise in SiGe pFETs is found to be significantly lower than in Si devices. This is mainly attributed to the physical separation of the holes confined in the SiGe channel from the Si/SiO2 interface. The low value of SiGe channel noise proves the good quality of epilayers and heterointerfaces, as also revealed by the TEM cross section
Keywords :
1/f noise; CMOS integrated circuits; Ge-Si alloys; MOSFET; integrated circuit noise; quantum well devices; semiconductor device measurement; semiconductor device noise; semiconductor materials; semiconductor-insulator boundaries; 0.13 micron; 1/f noise; CMOS technology; DC characteristics; LF noise characteristics; Si; Si-SiO2-Si-SiGe-Si; SiGe channel noise; SiGe p-channel FET; SiGe quantum well; hole confinement; low-frequency noise; p-FET; relative spectral power density; CMOS technology; FETs; Frequency; Germanium silicon alloys; Low-frequency noise; Oxidation; Performance evaluation; Semiconductor device doping; Semiconductor device noise; Silicon germanium;
Journal_Title :
Electron Devices, IEEE Transactions on
