Batch-type millimeter-size transformers for miniaturized power applications

Author

Amalou, Farid ; Bornand, Etienne L. ; Gijs, Martin A M

Author_Institution

Inst. of Microsystems, Swiss Federal Inst. of Technol., Lausanne, Switzerland

Volume

37

Issue

4

fYear

2001

fDate

7/1/2001 12:00:00 AM

Firstpage

2999

Lastpage

3003

Abstract

We have developed a novel batch-type technology for making three-dimensional (3-D) millimeter-sized transformers for ultrasmall low-power (0.1 to 1 Watt) applications. The technology uses the 3-D micropatterning of ferrite wafers by powder blasting to form the magnetic cores of the inductive devices, and combines these cores with electrical windings made by flex-foil printed circuit board technology. Microfabrication and assembly of the parts can be done in a batch process on a wafer/foil level, opening the way to further size reduction of the components. We have measured the inductive and resistive properties of our devices as a function of frequency and device geometry. The results clearly show the high potential of our technology for power applications in which small-size is important

Keywords

batch processing (industrial); ferrite devices; low-power electronics; power transformers; transformer cores; 0.1 to 1 W; 3D micropatterning; assembly; batch processing; electrical winding; ferrite wafer; flex-foil printed circuit board technology; inductive device; inductive properties; magnetic core; microfabrication; miniaturized low-power applications; powder blasting; resistive properties; three-dimensional millimeter-size transformer; Amorphous magnetic materials; Ferrites; Frequency; Inductance; Inductors; Magnetic cores; Magnetic materials; Printed circuits; Space technology; Transformer cores;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.947052

Filename

947052