Title :
Terahertz imaging using a monolithic metamaterial based detector
Author :
Carranza, Ivonne Escorcia ; Grant, James ; Cumming, David R. S.
Author_Institution :
Microsyst. Technol. Group, Univ. of Glasgow, Glasgow, UK
Abstract :
A terahertz detector composed of a metamaterial absorber and micro-bolometer sensor integrated in a standard CMOS process is presented. The prototype demonstrates an innovative, uncooled, low cost, compact terahertz detector that is readily scaleable to high resolution focal plane array formats. The detector imaging capability is demonstrated in a transmission mode experiment.
Keywords :
CMOS integrated circuits; bolometers; focal planes; microsensors; terahertz metamaterials; terahertz wave detectors; terahertz wave imaging; detector imaging capability; high resolution focal plane array formats; metamaterial absorber; micro-bolometer sensor; monolithic metamaterial based detector; standard CMOS process; terahertz detector; terahertz imaging; transmission mode experiment; Absorption; CMOS process; Detectors; Imaging; Laser beams; Lenses; Metamaterials;
Conference_Titel :
Infrared, Millimeter, and Terahertz waves (IRMMW-THz), 2014 39th International Conference on
Conference_Location :
Tucson, AZ
DOI :
10.1109/IRMMW-THz.2014.6956016
