Title :
Superconducting NdBa/sub 2/Cu/sub 3/O/sub 7-/spl delta// thin films prepared by the laser ablation method
Author :
Seung-Hyun Moon ; Byungdu Oh
Author_Institution :
LG Electron. Res. Center, Seoul, South Korea
fDate :
6/1/1997 12:00:00 AM
Abstract :
NdBa/sub 2/Cu/sub 3/O/sub 7-/spl delta//(NBCO) thin films were deposited on (100) SrTiO/sub 3/(STO) substrates by the laser ablation method. The transition temperature of thin films was very sensitive to the deposition parameters such as substrate temperature, chamber pressure, and the distance between target and substrate. Thin films of T/sub c//spl sim/93 K were obtained when we deposited at 770/spl deg/C and 800 mTorr of oxygen pressure. The NBCO thin films were grown epitaxially with c-axis preferred orientation. The critical current density of the thin films was /spl sim/1/spl times/10/sup 6/ A/cm/sup 2/ at 77 K. We have also studied the surface morphology with AFM, and the typical smoothness is /spl sim/3 nm.
Keywords :
atomic force microscopy; barium compounds; critical current density (superconductivity); high-temperature superconductors; neodymium compounds; pulsed laser deposition; superconducting epitaxial layers; superconducting transition temperature; surface topography; 3 nm; 770 to 800 C; 93 K; NdBa/sub 2/Cu/sub 3/O/sub 7-/spl delta// thin films; NdBa/sub 2/Cu/sub 3/O/sub 7/; SrTiO/sub 3/(100) substrates; atomic force microscopy; chamber pressure; critical current density; deposition parameters; high temperature superconductor; laser ablation method; substrate temperature; surface morphology; transition temperature; Critical current density; Laser ablation; Laser transitions; Sputtering; Substrates; Superconducting epitaxial layers; Superconducting thin films; Superconducting transition temperature; Temperature sensors; Transistors;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
