Title :
Deposition of YBCO and NBCO films on areas of 9 inches in diameter
Author :
Utz, B. ; Semerad, R. ; Bauer, M. ; Prusseit, W. ; Berberich, P. ; Kinder, H.
Author_Institution :
Dept. of Phys., Tech. Univ. Munchen, Germany
fDate :
6/1/1997 12:00:00 AM
Abstract :
High quality YBa/sub 2/Cu/sub 3/O/sub 7/ thin films can be grown by reactive thermal co-evaporation. Combined with a rotating disk heater this method allows to fabricate even double sided homogeneous films on substrate areas up to 9" diameter. A scanning inductive j/sub c/ probe is used to monitor the homogeneity of critical current densities of typically >2 MA/cm/sup 2/. Surface resistance values are found to be below 500 /spl mu//spl Omega/ at 10 GHz. On biaxially aligned buffer layers on polycrystalline substrates j/sub c/ values of 1.3 MA/cm/sup 2/ are achieved as well. The properties of Nd/sub 1-x/Ba/sub 2+x/Cu/sub 3/O/sub 7/ films grown with the same system are presented and evaluated.
Keywords :
CVD coatings; barium compounds; critical current density (superconductivity); high-temperature superconductors; neodymium compounds; superconducting thin films; surface conductivity; yttrium compounds; 10 GHz; 9 in; Nd/sub 1-x/Ba/sub 2+x/Cu/sub 3/O/sub 7/ films; NdBa/sub 2/Cu/sub 3/O/sub 7/; YBa/sub 2/Cu/sub 3/O/sub 7/; YBa/sub 2/Cu/sub 3/O/sub 7/ thin films; biaxially aligned buffer layers; even double sided homogeneous films; high temperature superconductor; polycrystalline substrates; reactive thermal co-evaporation; rotating disk heater; Crystalline materials; High temperature superconductors; Monitoring; Sputtering; Substrates; Superconducting device noise; Superconducting filters; Surface resistance; Transistors; Yttrium barium copper oxide;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
