Deposition of YBCO and NBCO films on areas of 9 inches in diameter

Author

Utz, B. ; Semerad, R. ; Bauer, M. ; Prusseit, W. ; Berberich, P. ; Kinder, H.

Author_Institution

Dept. of Phys., Tech. Univ. Munchen, Germany

Volume

7

Issue

2

fYear

1997

fDate

6/1/1997 12:00:00 AM

Firstpage

1272

Lastpage

1277

Abstract

High quality YBa/sub 2/Cu/sub 3/O/sub 7/ thin films can be grown by reactive thermal co-evaporation. Combined with a rotating disk heater this method allows to fabricate even double sided homogeneous films on substrate areas up to 9" diameter. A scanning inductive j/sub c/ probe is used to monitor the homogeneity of critical current densities of typically >2 MA/cm/sup 2/. Surface resistance values are found to be below 500 /spl mu//spl Omega/ at 10 GHz. On biaxially aligned buffer layers on polycrystalline substrates j/sub c/ values of 1.3 MA/cm/sup 2/ are achieved as well. The properties of Nd/sub 1-x/Ba/sub 2+x/Cu/sub 3/O/sub 7/ films grown with the same system are presented and evaluated.

Keywords

CVD coatings; barium compounds; critical current density (superconductivity); high-temperature superconductors; neodymium compounds; superconducting thin films; surface conductivity; yttrium compounds; 10 GHz; 9 in; Nd/sub 1-x/Ba/sub 2+x/Cu/sub 3/O/sub 7/ films; NdBa/sub 2/Cu/sub 3/O/sub 7/; YBa/sub 2/Cu/sub 3/O/sub 7/; YBa/sub 2/Cu/sub 3/O/sub 7/ thin films; biaxially aligned buffer layers; even double sided homogeneous films; high temperature superconductor; polycrystalline substrates; reactive thermal co-evaporation; rotating disk heater; Crystalline materials; High temperature superconductors; Monitoring; Sputtering; Substrates; Superconducting device noise; Superconducting filters; Surface resistance; Transistors; Yttrium barium copper oxide;

fLanguage

English

Journal_Title

Applied Superconductivity, IEEE Transactions on

Publisher

ieee

ISSN

1051-8223

Type

jour

DOI

10.1109/77.620749

Filename

620749