Title :
Power absorption characteristics of an inductively coupled plasma discharge
Author :
Yang, J.G. ; Yoon, N.S. ; Kim, B.C. ; Choi, J.H. ; Lee, G.S. ; Hwang, S.M.
Author_Institution :
Korea Basis Sci. Inst., Taejeon, South Korea
fDate :
6/1/1999 12:00:00 AM
Abstract :
Power absorption characteristics of an inductively coupled discharge are investigated experimentally and compared with a two-dimensional inductive heating theory in a planar single turn antenna at high frequency (18 MHz) and low pressure (⩽50 mtorr) conditions. We measure the resistance R, which consists of vacuum resistance Rν and the plasma resistance Rp for a given RF power of P=½Ic2R, where Ic is the coil current. The vacuum resistance is determined to be 0.44 R in our case. The plasma resistance increases as the gas pressure increases in a pressure range of 2 to 50 mtorr. Also, it increases with power. In a high-pressure range near 50 mtorr, however, it has a nearly constant value of about 0.6 Ω
Keywords :
discharges (electric); inductance; plasma heating; plasma pressure; plasma transport processes; RF power; coil current; high-pressure range; inductively coupled plasma discharge; planar single turn antenna; plasma resistance; power absorption characteristics; two-dimensional inductive heating theory; vacuum resistance; Absorption; Antenna measurements; Antenna theory; Current measurement; Electrical resistance measurement; Frequency; Heating; Plasma measurements; Plasma properties; Power measurement;
Journal_Title :
Plasma Science, IEEE Transactions on