• DocumentCode
    1527580
  • Title

    Diffusion modeling of an HF argon plasma discharge in a magnetic field

  • Author

    Vidal, François ; Johnston, Tudor Wyatt ; Margot, Joëlle ; Chaker, Mohamed ; Pauna, Olivier

  • Author_Institution
    INRS, Montreal, Que., Canada
  • Volume
    27
  • Issue
    3
  • fYear
    1999
  • fDate
    6/1/1999 12:00:00 AM
  • Firstpage
    727
  • Lastpage
    745
  • Abstract
    Using the basic moment equations (number density, flow density, and energy density) for singly ionized argon and for electrons, a simple diffusion equation (essentially one proposed by Lieberman and Lichtenberg, 1994) is adopted (by comparison with experiment), together with an integrated power balance equation. The effects of scaling magnetic field and radius are then discussed first for simple cylinders, for which there are known analytic diffusion solutions. For specific cases having the more complicated geometry of two abutting coaxial cylinders with considerably different radii, the numerical results are well approximated and delimited by considering only the wider cylinder for low magnetic field, and at high magnetic field, where end effects dominate, using the total length and the smallest diameter of the system
  • Keywords
    argon; diffusion; high-frequency discharges; plasma transport processes; Ar; HF argon plasma discharge; abutting coaxial cylinders; analytic diffusion solutions; basic moment equations; diameter; diffusion modeling; energy density; flow density; high magnetic field; integrated power balance equation; low magnetic field; magnetic radius; number density; scaling magnetic field; simple cylinders; total length; Argon; Electrons; Fault location; Geometry; Hafnium; Inductors; Magnetic fields; Plasma applications; Plasma density; Plasma sources;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/27.774677
  • Filename
    774677