Title :
RF discharge impedance measurements using a new method to determine the stray impedances
Author :
Bakker, Leon P. ; Kroesen, Gerrit M W ; De Hoog, Frederik J.
Author_Institution :
Eindhoven Univ. of Technol., Netherlands
fDate :
6/1/1999 12:00:00 AM
Abstract :
The impedance of a capacitively coupled radio frequency discharge in a tubular fluorescent lamp filled with neon and mercury is measured. The stray impedances in the electrical network are determined using a new method that requires no extra instruments. The reflection of power is used to determine the stray impedances. Making use of a simple discharge impedance model, the electron density in the lamp is estimated
Keywords :
electric impedance measurement; fluorescent lamps; high-frequency discharges; mercury (metal); neon; plasma density; plasma diagnostics; Ne-Hg; RF discharge; capacitively coupled radio frequency discharge; electrical network; electron density; impedance; impedance measurements; power reflection; simple discharge impedance model; stray impedances; tubular fluorescent lamp; Current measurement; Electrodes; Fault location; Fluorescent lamps; Frequency measurement; Impedance measurement; Inductors; Instruments; Radio frequency; Voltage;
Journal_Title :
Plasma Science, IEEE Transactions on
