DocumentCode :
1527864
Title :
Fabrication of Freestanding SiO 
-Membrane Systems for Thermo-Optic Adjusting of SOI Photonic Wires
Author :
Amthor, Julia ; Horn, Oliver ; Lipka, Timo ; Savov, Angel ; Müller, Jörg
Author_Institution :
Inst. of Micro Syst. Technol. (E-7), Hamburg Univ. of Technol., Hamburg, Germany
Volume :
23
Issue :
16
fYear :
2011
Firstpage :
1142
Lastpage :
1144
Abstract :
This work describes the design and fabrication of an electrostatically deflectable SiO2-membrane system with low-loss silicon-on-insulator (SOI) photonic wires. The photonic wires have been tuned thermo-optically and elasto-optically. A 10-mW thermo-optic switch is presented.
Keywords :
integrated optics; membranes; optical design techniques; optical fabrication; optical losses; optical switches; optical tuning; photoelasticity; silicon compounds; silicon-on-insulator; thermo-optical devices; SOI photonic wires; Si; SiO2; elasto-optical tuning; electrostatically deflectable-membrane system; freestanding-membrane systems; low-loss silicon-on-insulator photonic wires; power 10 mW; thermo-optic switch; thermo-optical tuning; Fabrication; Photonics; Resists; Silicon; Substrates; Tuning; Wires; Cantilever; elasto-optic; photonic wire; silicon-on-insulator (SOI); thermo-optic;
fLanguage :
English
Journal_Title :
Photonics Technology Letters, IEEE
Publisher :
ieee
ISSN :
1041-1135
Type :
jour
DOI :
10.1109/LPT.2011.2157909
Filename :
5776656
Link To Document :
