• DocumentCode
    1528486
  • Title

    Force-frequency coefficient of symmetrical incomplete circular quartz crystal resonator

  • Author

    Wang, Zheyao ; Zhu, Huizhong ; Dong, Yonggui ; Wang, Jinsong ; Feng, Guanping

  • Author_Institution
    Inst. of Microelectron., Tsinghua Univ., Beijing, China
  • Volume
    48
  • Issue
    5
  • fYear
    2001
  • Firstpage
    1471
  • Lastpage
    1478
  • Abstract
    The changes in the resonance frequencies of the thickness-shear vibration of symmetrical incomplete circular AT-cut quartz crystal resonators (QXRs), which are used as sensing elements in digital force sensors or pressure transducers, by the application of diametrical forces are discussed by considering the piezoelectric effect and the anisotropic characteristics of crystal plates. Two-dimensional motion equations for predicting the frequency changes are derived from three-dimensional piezoelectricity equations, and equations deduced by Janiaud for solving the stress distribution in crystal plates are used to calculate the force-frequency coefficients of incomplete circular resonators. The results show that the piezoelectric effect of crystal plates decreases the force-frequency coefficient of the azimuth angle 0/spl deg/ by 7% as compared with no piezoelectricity assumption. The incomplete circular shape can be applied to a larger load than the circular disc because the flat regions of the incomplete shape provide a distributed load application without the problems of stress concentration of a point force inherent to a circular disc. The incomplete shape gives an increased force sensitivity when compared with the complete disc near azimuth angle 0/spl deg/. The theoretical curves agree well with Ratajski´s experimental results.
  • Keywords
    crystal resonators; force sensors; piezoelectric transducers; pressure transducers; quartz; vibrations; SiO/sub 2/; anisotropic characteristics; circular disc; crystal plate; digital force sensor; force-frequency coefficient; piezoelectric effect; pressure transducer; resonance frequency; stress distribution; symmetrical incomplete circular AT-cut quartz crystal resonator; thickness-shear vibration; three-dimensional piezoelectricity equation; two-dimensional motion equation; Azimuth; Equations; Force sensors; Piezoelectric effect; Piezoelectric transducers; Piezoelectricity; Resonance; Resonant frequency; Shape; Stress;
  • fLanguage
    English
  • Journal_Title
    Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0885-3010
  • Type

    jour

  • DOI
    10.1109/58.949758
  • Filename
    949758