Vapor phase synthesis of fine particles

Author

Da Cruz, Antonio Carlos ; Munz, Richard Jügr

Author_Institution

Plasma Technol. Res. Centre, McGill Univ., Montreal, Que., Canada

Volume

25

Issue

5

fYear

1997

fDate

10/1/1997 12:00:00 AM

Firstpage

1008

Lastpage

1016

Abstract

Aluminum nitride (AlN) ultrafine powder is synthesized in a new concept plasma reactor whose reaction section is separated from the plasma chamber, Aluminum is evaporated using a transferred-arc in either an Ar or Ar/H₂ atmosphere. The hot gas carrying metal vapor is mixed with radial jets of NH₃/Ar mixture. A mathematical model of the reaction zone is developed, which includes the calculation of fluid flow, temperature, and concentration fields, followed by the nucleation and growth of fine particles, using the method of moments. The initial results of the experimental and modeling study on the influence of temperature and nitriding jet intensity on particle size and conversion are presented. The powder produced has a specific surface area (SSA) in the range of 40-280 m²/g

Keywords

aluminium compounds; arcs (electric); ceramics; method of moments; nucleation; particle size; plasma applications; plasma density; plasma flow; plasma jets; plasma temperature; powder technology; surface hardening; AlN; Ar; Ar-N₂; Ar/H₂; NH₃-Ar; NH₃/Ar mixture; concentration fields; conversion; fine particles; fluid flow; growth; hot gas carrying metal vapor; mathematical model; method of moments; nitriding jet intensity; nucleation; particle size; plasma chamber; plasma reactor; radial jets; reaction section; reaction zone; specific surface area; temperature; transferred-arc; ultrafine powder; vapor phase synthesis; Aluminum nitride; Argon; Atmosphere; Inductors; Mathematical model; Moment methods; Plasma applications; Plasma temperature; Powders; Production;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/27.649619

Filename

649619