• DocumentCode
    1528700
  • Title

    Experimental investigation of atmospheric pressure nonequilibrium plasma chemistry

  • Author

    Kruger, Charles H. ; Owano, Thomas G. ; Laux, Christophe O.

  • Author_Institution
    Div. of Thermosci., Stanford Univ., CA, USA
  • Volume
    25
  • Issue
    5
  • fYear
    1997
  • fDate
    10/1/1997 12:00:00 AM
  • Firstpage
    1042
  • Lastpage
    1051
  • Abstract
    Atmospheric pressure plasmas are frequently considered to be in local thermodynamic equilibrium due to the high frequency of collisional processes which drive the plasma state toward a Maxwell-Boltzmann equilibrium. However, various forms of thermodynamic, ionizational, and chemical nonequilibrium have been demonstrated and investigated in atmospheric pressure plasma environments over the last several years, and the nonequilibrium behaviour of such systems can be quite significant. The investigation, understanding, and exploitation of atmospheric pressure nonequilibrium plasma chemistry is necessary to the further expansion of plasma-based systems into mainstream manufacturing and processing applications. Several experimental programs to investigate the fundamental processes of atmospheric pressure nonequilibrium plasma chemistry and the application of this nonequilibrium to various chemical systems have been undertaken in our laboratories, The results of these investigations have shed light on the kinetics behind various forms of atmospheric pressure nonequilibrium chemistry, and have provided insights into the beneficial control of nonequilibrium plasma chemistry for processing applications
  • Keywords
    arcs (electric); chemical reactions; chemistry; plasma CVD; plasma applications; plasma collision processes; plasma diagnostics; plasma flow; plasma jets; plasma thermodynamics; plasma torches; Maxwell-Boltzmann equilibrium; atmospheric pressure nonequilibrium plasma chemistry; atmospheric pressure plasmas; chemical nonequilibrium; chemical systems; collisional processes; high-enthalpy direct-current arcjet; kinetics; local thermodynamic equilibrium; manufacturing applications; nonequilibrium behaviour; nonequilibrium plasma chemistry; plasma state; plasma-based systems; processing applications; radio-frequency plasma torch; Atmospheric-pressure plasmas; Chemical processes; Frequency; Kinetic theory; Laboratories; Manufacturing processes; Plasma applications; Plasma chemistry; Plasma materials processing; Thermodynamics;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/27.649624
  • Filename
    649624