The classification and determination the quantity of chemical gases considering the effect of moisture with SAW sensor arrays

In this study, Surface Acoustic Wave(SAW) sensor arrays have been used as chemical gas sensors. SAW sensors show different characteristics depending on the type and thickness of their coating materials. Furthermore these sensors are also affected by moisture. Taking into account that humidity values in the environment change in time, to make correct guesses it should be considered how humidity affects sensor reactions. According to the plan prepared, specific concentrations of analytes have been applied to sensor arrays used, during certain periods of time and under specific humidity values. The frequency change data of the sensor has recorded. By examining the data, the sensors that would be evaluated in the study have been determined. The obtained data have been analyzed in a variety of methods and an attempt has been made to determine the type and quantity of analytes by using the artificial neural networks (ANNs). As a result, by using 4 sensors, the type of gases can be estimated with an average of 0% error, on the otherhand the concentration of gases can be estimated with an average of 2.34% error.