Title :
Digital processing of VLSI circuit images obtained from a scanning electron microscope
Author :
Zolghadrasli, Alireza
fDate :
6/1/1990 12:00:00 AM
Abstract :
The aim of this work is to detect and correct deformations of images of VLSI circuits obtained from a scanning electron microscope (SEM) and obtain a perfect image for comparison (correlation) with the mask descriptions provided by CAD tools for automatic test of circuits. The major application area is in debugging the prototype circuits. The programs, which use the correlation between the corrected image and the mask, can be efficiently employed in the IC failure analysis phase (structural defects)
Keywords :
VLSI; automatic testing; circuit CAD; computerised picture processing; integrated circuit testing; scanning electron microscopy; CAD; IC failure analysis; VLSI circuit images; automatic test; correlation; debugging; image deformation correction; mask; prototype circuits; scanning electron microscope; structural defects; Aluminum; Automatic testing; Circuit testing; Debugging; Failure analysis; Numerical analysis; Optical microscopy; Scanning electron microscopy; Transfer functions; Very large scale integration;
Journal_Title :
Circuits and Systems, IEEE Transactions on
