Title :
Direct-Vapor-Phase Grown
Micronanostructures for Ethanol, Acetone, and Propanol Gas Sensor
Author :
Hullavarad, Nilima V. ; Hullavarad, Shiva S.
Author_Institution :
Office of Electron. Miniaturization, Univ. of Alaska Fairbanks, Fairbanks, AK, USA
Abstract :
Iridium oxide (IrO2 ) micronanostructures are grown on fused silica (FS), Si (1 0 0) and copper (Cu) substrates using direct-vapor-phase (DVP) technique and investigated for gas-sensing properties. The shape and size of IrO2 micronanostructures depend on the rate of evaporation of source material. The sensitivity of IrO2 to ethanol, acetone, and propanol is tested under similar test conditions. The sensitivity is clearly distinguishable by measuring the change in the response (recovery) time for ethanol, acetone, and propanol, and are measured to be 3 (2.9 s), 4.7 (3.9 s), and 5.1 s (4 s), respectively.
Keywords :
crystal microstructure; gas sensors; iridium compounds; nanostructured materials; semiconductor growth; semiconductor materials; vapour phase epitaxial growth; Cu; IrO2; Si; SiO2; acetone; direct-vapor-phase growth; direct-vapor-phase technique; ethanol; gas sensor; gas-sensing properties; micronanostructure; propanol; source material evaporation; Chemical sensors; Copper; Electrodes; Ethanol; Ferroelectric materials; Gas detectors; Gases; Nanostructures; Optical materials; Testing; Direct vapor phase (DVP); gas sensor; iridium oxide ( $hbox{IrO}_{2}$); nanostructures; nanotubes;
Journal_Title :
Nanotechnology, IEEE Transactions on
DOI :
10.1109/TNANO.2010.2056696