High-speed 980 nm vertical cavity surface emitting lasers with a multi-oxide layer structure for single-mode operation

High-speed, single transverse mode, oxide-confined, 980 nm vertical cavity surface emitting lasers with a multi-oxide layer structure to maintain single-mode operation with increased oxide aperture diameter are fabricated and characterised. Lasers with an 8 μm-diameter oxide aperture operated in a single fundamental mode under continuous wave condition with a side-mode suppression ratio of 32 dB at current densities up to 20 times threshold and exhibited a 3 dB modulation frequency bandwidth up to 13 GHz at a current density of only 10 kA/cm². The threshold current and voltage were as low as 260 A and 1.45 V, respectively.