Title :
Vertical resonant couplers with precise coupling efficiency control fabricated by wafer bonding
Author :
Tishinin, D.V. ; Dapkus, P.D. ; Bond, A.E. ; Kim, I. ; Lin, C.K. ; O´Brien, J.
Author_Institution :
Dept. of Electr. Eng., Univ. of Southern California, Los Angeles, CA, USA
Abstract :
A fabrication technique to create complex three-dimensional waveguide devices is effected by using wafer bonding to process two sides of an epitaxial structure. Vertical resonant couplers with precise control over coupling efficiency are demonstrated.
Keywords :
epitaxial growth; integrated optics; integrated optoelectronics; optical directional couplers; optical fabrication; optical waveguides; wafer bonding; 3D optical waveguide devices; complex three-dimensional waveguide devices; coupling efficiency; epitaxial structure; optical fabrication; precise coupling efficiency control; vertical resonant couplers; wafer bonding; Coupling circuits; Epitaxial growth; Optical fiber couplers; Optical resonators; Optical waveguides; Planar waveguides; Resonance; Semiconductor waveguides; Wafer bonding; Wavelength division multiplexing;
Journal_Title :
Photonics Technology Letters, IEEE
