Title :
Optimization of design and microfabrication of metamaterial-based absorber for terahertz microbolometer
Author :
Oulachgar, H. ; Paultre, J.-E. ; Provencal, F. ; D´Amato, D. ; Beaupre, P. ; Alain, C. ; Jerominek, H.
Author_Institution :
Inst. Nat. d´Opt. (INO), Quebec City, QC, Canada
Abstract :
The sensitivity of uncooled microbolometer detectors to terahertz radiation can be significantly improved by enhancing the platform absorption. This paper presents the various aspects of design and optimization of metamaterial based frequency selective terahertz absorber. It also briefly discusses the microfabrication of terahertz microbolometer focal plane array which was recently developed at INO.
Keywords :
metamaterials; microfabrication; optimisation; frequency selective terahertz absorber; metamaterial based absorber; microbolometer detectors; microfabrication design optimisation; platform absorption; terahertz microbolometer; terahertz microbolometer focal plane array; Absorption; Arrays; Detectors; Microfabrication; Microstructure; Periodic structures;
Conference_Titel :
Infrared, Millimeter, and Terahertz waves (IRMMW-THz), 2014 39th International Conference on
Conference_Location :
Tucson, AZ
DOI :
10.1109/IRMMW-THz.2014.6956211
