Title :
Fabrication and properties of CoPt patterned media with perpendicular magnetic anisotropy
Author :
Aoyama, Tsutomu ; Uchiyama, Kenji ; Kagotani, Tsuneo ; Hattori, Kazuhiro ; Wada, Yoshimitsu ; Okawa, Shuichi ; Hatate, Hitoshi ; Nishio, Hiroaki ; Sato, Isamu
Author_Institution :
Data Storage Technol. Center, TDK Corp., Nagano, Japan
fDate :
7/1/2001 12:00:00 AM
Abstract :
Magnetic dot-arrays with dot diameters of 80 to 1000 nm have been fabricated by patterning CoPt alloy continuous films. All of the fabricated dots had their magnetic easy axes perpendicular to the plane. From MFM observations, dots with diameters of 160 nm and larger had multi domain structures. For the dot-array with 80 nm dot diameter, every dot was observed as a single domain. CoPt dot-array with 80 nm dot diameter showed excellent thermal stability in comparison with conventional longitudinal media and perpendicular media
Keywords :
arrays; cobalt alloys; discontinuous metallic thin films; electron beam lithography; ferromagnetic materials; hard discs; magnetic domains; magnetic thin films; perpendicular magnetic anisotropy; perpendicular magnetic recording; platinum alloys; sputter deposition; sputter etching; sputtered coatings; thermal stability; 80 to 1000 nm; CoPt; CoPt alloy continuous film patterning; CoPt dot-array; CoPt patterned media; MFM observations; RIE; fabrication; magnetic dot-arrays; magnetic easy axes; magnetic layer deposition; multi domain structures; perpendicular magnetic anisotropy; thermal stability; Etching; Fabrication; Lithography; Magnetic anisotropy; Magnetic force microscopy; Magnetic materials; Magnetic properties; Perpendicular magnetic anisotropy; Sputtering; Thermal stability;
Journal_Title :
Magnetics, IEEE Transactions on
