• DocumentCode
    153046
  • Title

    Field and temperature-dependent thin film characterization with a continuous-wave terahertz magneto-spectrometer

  • Author

    Daughton, D.R. ; Higgins, R. ; Yano, Sumio

  • Author_Institution
    Lake Shore Cryotronics, Westerville, OH, USA
  • fYear
    2014
  • fDate
    14-19 Sept. 2014
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We report on a non-contact, non-destructive evaluation system which utilizes frequency-domain THz transmission spectroscopy to examine the temperature and magnetic field-dependent conductivity of thin film on substrate materials.
  • Keywords
    magneto-optical devices; terahertz materials; terahertz spectroscopy; thin films; continuous-wave terahertz magneto-spectrometer; frequency-domain THz transmission spectroscopy; noncontact evaluation system; nondestructive evaluation system; temperature-dependent thin film; Conductivity; Films; Semiconductor device measurement; Substrates; Temperature measurement; Thickness measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Infrared, Millimeter, and Terahertz waves (IRMMW-THz), 2014 39th International Conference on
  • Conference_Location
    Tucson, AZ
  • Type

    conf

  • DOI
    10.1109/IRMMW-THz.2014.6956227
  • Filename
    6956227
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=153046