The effect of Cr addition on structure and corrosion resistance in FeTiN nanocrystalline soft magnetic thin films

Author

Choi, H.W. ; Kim, K.H. ; Kim, J. ; Han, S.H. ; Kim, H.J.

Author_Institution

Dept. of Metall. & Mater. Sci., Hanyang Univ., Ansan, South Korea

Volume

37

Issue

4

fYear

2001

fDate

7/1/2001 12:00:00 AM

Firstpage

1773

Lastpage

1775

Abstract

FeTiN and FeCrTiN thin films were prepared by reactive rf magnetron sputtering. Fe_92.3Ti_2.1N_5.6 (at.%) films showed excellent thermal stability and soft magnetic properties; saturation magnetization (4πM_s)~19.5 kG, coercivity (H_c)~1.2 Oe and effective permeability (μ_eff)~2000 at 100 MHz. However, the corrosion resistance behaviors of the FeTiN films were similar to those of other FeMN films. For improving the corrosion resistance of the FeTiN films without the deterioration of magnetic properties, Cr was added to the FeTiN films. In an as-deposited Fe_90.3Cr_1.2Ti_1.1N _7.4 film, the permeability reached about 2700 at 100 MHz and 4πM_s and H_c showed ~18.6 kG and 1.5 Oe, respectively. From XRD and TEM results, the sizes of α-Fe grains in the FeTiN and FeCrTiN films were observed to be below 10 nm and the grain orientations of the FeCrTiN films were more evenly distributed than the FeTiN films. Also, an addition of Cr in FeTiN films improved the corrosion resistance without the deterioration of soft magnetic properties on FeCrTiN films, caused by the formation of passivation layers in their surface

Keywords

X-ray diffraction; chromium compounds; coercive force; corrosion resistance; ferromagnetic materials; iron compounds; magnetic permeability; magnetic thin films; magnetisation; nanostructured materials; passivation; soft magnetic materials; sputtered coatings; thermal stability; titanium compounds; transmission electron microscopy; Cr addition; FeCrTiN; FeTiN; FeTiN nanocrystalline thin film; TEM; X-ray diffraction; coercivity; corrosion resistance; effective permeability; grain orientation; grain size; reactive RF magnetron sputtering; saturation magnetization; soft magnetic properties; structure; surface passivation layer; thermal stability; Chromium; Corrosion; Iron; Magnetic films; Magnetic properties; Permeability; Saturation magnetization; Soft magnetic materials; Sputtering; Surface resistance;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.950964

Filename

950964