DocumentCode :
1530855
Title :
Transmission through optically generated inductive grid arrays
Author :
Lockyer, D.S. ; Vardaxoglou, J.C. ; Kearney, M.J.
Author_Institution :
Dept. of Electron. & Electr. Eng., Loughborough Univ. of Technol., UK
Volume :
47
Issue :
7
fYear :
1999
fDate :
7/1/1999 12:00:00 AM
Firstpage :
1391
Lastpage :
1397
Abstract :
A technique is developed for generating pseudometallic plasma inductive grid arrays within a semiconductor wafer. The induced plasma elements are defined by a surface impedance which is discussed. Results of an investigation into the transmission properties of a variety of array designs between 16 and 40 GHz are presented. Measurements are performed on a silicon wafer illuminated by an external optical source via a negative image mask
Keywords :
aperture antennas; dipole antenna arrays; frequency selective surfaces; microwave antenna arrays; microwave photonics; optical control; periodic structures; array designs; external optical source; induced plasma elements; negative image mask; optically generated inductive grid arrays; pseudometallic plasma inductive grid arrays; surface impedance; transmission properties; Arrayed waveguide gratings; Dielectric substrates; Mesh generation; Microwave antenna arrays; Optical arrays; Optical waveguides; Plasma properties; Plasma sources; Silicon; Surface impedance;
fLanguage :
English
Journal_Title :
Microwave Theory and Techniques, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9480
Type :
jour
DOI :
10.1109/22.775484
Filename :
775484
Link To Document :
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