Micromachined 300-GHz SU-8-Based Slotted Waveguide Antenna

Author

Wang, Yi ; Ke, Maolong ; Lancaster, Michael J. ; Chen, Jian

Author_Institution

Sch. of Electr., Electron. & Comput. Eng., Univ. of Birmingham, Birmingham, UK

Volume

10

fYear

2011

fDate

7/3/1905 12:00:00 AM

Firstpage

573

Lastpage

576

Abstract

A micromachined 300-GHz slotted waveguide antenna is demonstrated using a simple fabrication technique based on metal-coated SU-8 thick resist. The antenna is designed to be built from a four-layer structure of equal layer thickness. It is fully characterized, and the measured radiation patterns show excellent agreement with the simulation. An H-plane matched right-angle bend is integrated in the antenna in order to achieve reliable and accurate connection with standard waveguide flange. The micromachined antenna is directional and low-profile and may find applications in low-cost sensors and radars.

Keywords

antenna radiation patterns; micromachining; millimetre wave antennas; resists; slot antennas; waveguide discontinuities; H-plane matched right-angle bend; equal layer thickness; four-layer structure; frequency 300 GHz; metal-coated SU-8 thick resist; micromachined SU-8-based slotted waveguide antenna; radiation patterns; standard waveguide flange; Antenna measurements; Antenna radiation patterns; Fabrication; Flanges; Silver; Slot antennas; Micromachining; millimeter-wave waveguides; slot arrays; waveguide bends;

fLanguage

English

Journal_Title

Antennas and Wireless Propagation Letters, IEEE

Publisher

ieee

ISSN

1536-1225

Type

jour

DOI

10.1109/LAWP.2011.2158285

Filename

5782927