Integrated calibration switches for compact planetary instruments

Author

Jung-Kubiak, Cecile ; Reck, Theodore ; Chattopadhyay, Goutam

Author_Institution

Jet Propulsion Lab., California Inst. of Technol., Pasadena, CA, USA

fYear

2014

fDate

14-19 Sept. 2014

Firstpage

1

Lastpage

2

Abstract

A highly integrated calibration switch operating in the 500-750 GHz band is fabricated using silicon micromachining and measured. The silicon pieces are fabricated using DRIE micro-fabrication techniques and are assembled using silicon compression pins. This compact approach will enable, for the first time, an integrated Dickie switch radiometer at this frequency band and will facilitate calibration of multi-pixel receiver arrays at terahertz frequencies.

Keywords

aerospace instrumentation; calibration; elemental semiconductors; microassembling; micromachining; radiometers; silicon; sputter etching; submillimetre wave measurement; DRIE microfabrication technique; Si; assembling; compact planetary instrument; frequency 500 GHz to 750 GHz; highly integrated calibration switch; integrated Dickie switch radiometer; micromachining; multipixel receiver array; silicon compression pins; Actuators; Calibration; Instruments; Optical device fabrication; Optical switches; Optical waveguides; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Infrared, Millimeter, and Terahertz waves (IRMMW-THz), 2014 39th International Conference on

Conference_Location

Tucson, AZ

Type

conf

DOI

10.1109/IRMMW-THz.2014.6956262

Filename

6956262