• DocumentCode
    1531465
  • Title

    Dynamics of HiPIMS Discharge Operated in Oxygen

  • Author

    Hála, M. ; Zabeida, O. ; Klemberg-Sapieha, J.E. ; Martinu, L.

  • Author_Institution
    Dept. of Eng. Phys., Ecole Polytech. de Montreal, Montreal, QC, Canada
  • Volume
    39
  • Issue
    11
  • fYear
    2011
  • Firstpage
    2582
  • Lastpage
    2583
  • Abstract
    We report on time- and species-resolved plasma imaging analysis of high-power impulse magnetron sputtering discharge operated above a Cr target in pure oxygen. It was found that the discharge emission is dominated by oxygen species. No metal-dominated sputtering has been detected, in contrast to the discharges in Ar, N2, and N2/Ar mixtures investigated previously.
  • Keywords
    argon; chromium; discharges (electric); gas mixtures; nitrogen; oxygen; plasma diagnostics; Ar; HiPIMS discharge dynamics; N2; N2-Ar; O2; discharge emission process; high-power impulse magnetron sputtering discharge; species-resolved plasma imaging analysis; time-resolved plasma imaging analysis; Argon; Discharges; Magnetic resonance imaging; Optical imaging; Optical pulses; Plasmas; Stimulated emission; High-power impulse magnetron sputtering (HiPIMS); magnetron sputtering; optical emission spectroscopy; optical filters; pulsed plasmas;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/TPS.2011.2150248
  • Filename
    5782996
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1531465