Imaging at the Nanoscale With Practical Table-Top EUV Laser-Based Full-Field Microscopes

Author

Brizuela, Fernando ; Howlett, Isela D. ; Carbajo, Sergio ; Peterson, Diana ; Sakdinawat, A. ; Liu, Yanwei ; Attwood, David T. ; Marconi, Mario C. ; Rocca, Jorge J. ; Menoni, Carmen S.

Author_Institution

Dept. of Electr. & Comput. Eng., Colorado State Univ., Fort Collins, CO, USA

Volume

18

Issue

1

fYear

2012

Firstpage

434

Lastpage

442

Abstract

The demonstration of table-top high average power extreme-ultraviolet (EUV) lasers combined with the engineering of specialized optics has enabled the demonstration of full-field microscopes that have achieved tens of nanometer spatial resolution. This paper describes the geometry of the EUV microscopes tailored to specific imaging applications. The microscope illumination characteristics are assessed and an analysis on the microscope´s spatial resolution is presented. Examples of the capabilities of these table-top EUV aerial microscopes for imaging nanostructures and surfaces are presented.

Keywords

X-ray lasers; image resolution; laser beam applications; nanophotonics; optical images; optical microscopes; aerial microscopes; extreme ultraviolet lasers; microscope illumination characteristics; nanometer spatial resolution; nanoscale imaging; practical table-top EUV laser-based full field microscopes; specialized optics; Gratings; Lasers; Lighting; Microscopy; Optical microscopy; Spatial resolution; Ultraviolet sources; Extreme ultraviolet (EUV) lasers; imaging; microscopy; nanotechnology;

fLanguage

English

Journal_Title

Selected Topics in Quantum Electronics, IEEE Journal of

Publisher

ieee

ISSN

1077-260X

Type

jour

DOI

10.1109/JSTQE.2011.2158393

Filename

5783289