Title :
Co-Zr-O nano-granular thin films with improved high frequency soft magnetic properties
Author :
Ohnuma, S. ; Lee, H.J. ; Kobayashi, N. ; Fujimori, H. ; Masumoto, T.
Author_Institution :
Res. Inst. for Electr. & Magnetic Mater., Sendai, Japan
fDate :
7/1/2001 12:00:00 AM
Abstract :
A study was made of the properties and structure of Co-Zr-O nano-granular films prepared by rf reactive sputtering in an atmosphere of argon and oxygen gases. We found soft magnetic Co-Zr-O films in a wide compositional range near Co-ZrO2 and investigated systematically the compositional dependence of their magnetic properties and electrical resistivity. The films near Co60Zr10O30 simultaneously have anisotropy fields more than 150 Oe, coercivities less than 3 Oe, saturation magnetizations more than 9 kG, and electrical resistivities more than 1000 μΩcm. The frequency response of permeability of these films is excellent. And they show a high resonance frequency exceeding 3 GHz
Keywords :
cobalt compounds; electrical resistivity; magnetic permeability; magnetic thin films; magnetisation; nanostructured materials; sputtered coatings; zirconium compounds; 3 GHz; 9 kG; Ar; Co-Zr-O; Co-Zr-O nano-granular thin films; Co-ZrO2; Co60Zr10O30; HF soft magnetic properties; O2; RF reactive sputtering; anisotropy field above 150 Oe; anisotropy fields; coercivities below 3 Oe; compositional dependence; electrical resistivities; permeability; resonance frequency above 3 GHz; saturation magnetization above 9 kG; Argon; Atmosphere; Electric resistance; Frequency; Gases; Magnetic films; Nanostructures; Saturation magnetization; Sputtering; Transistors;
Journal_Title :
Magnetics, IEEE Transactions on
