DocumentCode
1532150
Title
New growth method of solid phase epitaxy in sputtered YIG films
Author
Jang, Pyung Woo ; Kim, Ji Young
Author_Institution
Dept. of Phys., Chongju Univ., Cheongju, South Korea
Volume
37
Issue
4
fYear
2001
fDate
7/1/2001 12:00:00 AM
Firstpage
2438
Lastpage
2440
Abstract
A new method of growing YIG films by solid phase epitaxy was attempted, for which amorphous Y-Fe-O films were sputtered on GGG (111) substrates at room temperature with a high sputtering rate, and subsequently annealed in various atmosphere at a temperature higher than 650°C. A possibility for SPE in YIG film could be verified by a constant growth rate of YIG films during the annealing as well as by results of both θ-2θ scanning and a very low value of Δθ50 in rocking curves
Keywords
X-ray diffraction; annealing; garnets; magnetic epitaxial layers; solid phase epitaxial growth; sputtered coatings; yttrium compounds; 650 C; GGG(111) substrate; X-ray diffraction; Y-Fe-O amorphous film; YFe5O12; YIG; YIG sputtered film; annealing; growth method; solid phase epitaxy; Amorphous materials; Annealing; Epitaxial growth; Iron; Magnetic films; Optical films; Solids; Sputtering; Substrates; Temperature;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/20.951196
Filename
951196
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