Title :
Enhancement of optical properties for CdTe absorber through improving thickness uniformity by CMP process
Author :
Kim, N.-H. ; Choi, Y.-O. ; Lee, Woo-sang
Author_Institution :
Res. Inst. for Catalysis, Chonnam Nat. Univ., Gwangju, South Korea
fDate :
7/1/2010 12:00:00 AM
Abstract :
The enhanced optical properties including absorbance of cadmium telluride (CdTe) thin film as an absorber in heterojunctioned solar cells were experimentally obtained by the chemical mechanical planarisation (CMP) process after sputtering deposition, which had been caused by improving the thickness uniformity of the as-deposited CdTe thin film.
Keywords :
II-VI semiconductors; cadmium compounds; chemical mechanical polishing; planarisation; semiconductor thin films; sputter deposition; CMP processing; CdTe; cadmium telluride thin films; chemical mechanical planarisation processing; enhanced optical properties; heterojunctioned solar cells; improving thickness uniformity; sputtering deposition;
Journal_Title :
Electronics Letters
DOI :
10.1049/el.2010.1135
