Fabrication of high frequency DC-DC converter using Ti/FeTaN film inductor

Author

Kim, Choong-sik ; Bae, Seok ; Kim, Hee-Jun ; Nam, Seoung-eui ; Kim, Hyoung-june

Author_Institution

Dept. of Metall. & Mater. Sci., Hong-Ik Univ., Seoul, South Korea

Volume

37

Issue

4

fYear

2001

fDate

7/1/2001 12:00:00 AM

Firstpage

2894

Lastpage

2896

Abstract

We fabricated a planar-type film inductor with good high frequency characteristics using a FeTaN soft magnetic film. While FeTaN films inherently show good soft magnetic properties and high saturation magnetization, addition of Ti underlayer with a combination of magnetic field annealing leads to an increase of anisotropy field (H_k), thus improving high frequency characteristics. Planar-type spiral inductors using Ti/FeTaN films exhibit an inductance of ~1 μH, resistance of ~2 ohm, and Q factor of 2.3 at 2 MHz. We also fabricated a hybrid ZVS-CV buck converter using the film inductor. The converter shows about 80% of the conversion efficiency at 1.2 MHz, which withstands a load current up to 300 mA

Keywords

DC-DC power convertors; Q-factor; ferromagnetic materials; inductors; iron alloys; magnetic anisotropy; magnetic thin film devices; soft magnetic materials; tantalum alloys; titanium; 0 to 300 mA; 1.2 MHz; 2 MHz; 2 ohm; Q factor; Ti-FeTaN; anisotropy field; conversion efficiency; high frequency DC-DC converter; high frequency characteristics; hybrid ZVS-CV buck converter; inductance; load current; magnetic field annealing; planar-type film inductor; planar-type spiral inductors; saturation magnetization; Anisotropic magnetoresistance; Annealing; DC-DC power converters; Fabrication; Frequency conversion; Magnetic fields; Magnetic films; Magnetic properties; Saturation magnetization; Spirals;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.951339

Filename

951339