Title :
Dynamics of Near-Atmospheric-Pressure Hydrogen Plasmas Driven by Pulsed High Voltages
Author :
Lo, Chieh-Wen ; Hamaguchi, Satoshi
Author_Institution :
Dept. of Phys., Nat. Cheng Kung Univ., Tainan, Taiwan
Abstract :
The formation mechanism of hydrogen plasmas by nanosecond high-voltage pulses at near-atmospheric pressure was examined by particle-in-cell/Monte-Carlo-collision simulations. In the model system, plasmas were generated between parallel metal electrodes. The simulation results show the propagation of ionization fronts and the formation of non-Maxwellian electron-energy distributions. The time evolution of plasma dynamics observed in the simulations has been confirmed to be in good agreement with recent experimental results.
Keywords :
Monte Carlo methods; hydrogen; ionisation; plasma simulation; plasma sources; H; hydrogen plasma dynamics; hydrogen plasma formation mechanism; ionization front propagation; nanosecond high-voltage pulses; nonMaxwellian electron-energy distribution formation; parallel metal electrodes; particle-in-cell/Monte-Carlo-collision simulations; pulsed high voltages; time evolution; Cathodes; Discharges; Ionization; Monte Carlo methods; Plasmas; Semiconductor process modeling; Atmospheric-pressure plasmas; nanosecond-pulsed discharge; plasma simulation;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2011.2155092
