Dynamics of Near-Atmospheric-Pressure Hydrogen Plasmas Driven by Pulsed High Voltages

Author

Lo, Chieh-Wen ; Hamaguchi, Satoshi

Author_Institution

Dept. of Phys., Nat. Cheng Kung Univ., Tainan, Taiwan

Volume

39

Issue

11

fYear

2011

Firstpage

2100

Lastpage

2101

Abstract

The formation mechanism of hydrogen plasmas by nanosecond high-voltage pulses at near-atmospheric pressure was examined by particle-in-cell/Monte-Carlo-collision simulations. In the model system, plasmas were generated between parallel metal electrodes. The simulation results show the propagation of ionization fronts and the formation of non-Maxwellian electron-energy distributions. The time evolution of plasma dynamics observed in the simulations has been confirmed to be in good agreement with recent experimental results.

Keywords

Monte Carlo methods; hydrogen; ionisation; plasma simulation; plasma sources; H; hydrogen plasma dynamics; hydrogen plasma formation mechanism; ionization front propagation; nanosecond high-voltage pulses; nonMaxwellian electron-energy distribution formation; parallel metal electrodes; particle-in-cell/Monte-Carlo-collision simulations; pulsed high voltages; time evolution; Cathodes; Discharges; Ionization; Monte Carlo methods; Plasmas; Semiconductor process modeling; Atmospheric-pressure plasmas; nanosecond-pulsed discharge; plasma simulation;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/TPS.2011.2155092

Filename

5783942