Title :
Analysis of multilayered thin-film piezoelectric transducer arrays
Author :
Li, Hui ; Du, Hualong ; Xu, Limei ; Hu, Yuantai ; Fan, Hui ; Yang, Jiashi
Author_Institution :
Inst. of Astronaut. & Aeronaut., Univ. of Electron. Sci. & Technol., Chengdu, China
fDate :
11/1/2009 12:00:00 AM
Abstract :
We study coupled extensional and flexural vibrations of a 1-D array of partially electroded, multilayered piezoelectric transducers. The classical theory for laminated plates is used. A theoretical solution is obtained. Based on the solution, basic vibration characteristics of resonant frequencies, mode shapes, and admittance are calculated. Their dependence on geometric parameters is examined. The present analysis represents a significant progress of existing analyses on a single cell of a transducer array.
Keywords :
multilayers; piezoelectric transducers; sensor arrays; thin film sensors; vibrations; multilayered thin-film piezoelectric transducer arrays; vibration characteristics; Aerospace engineering; Capacitive sensors; Civil engineering; Equations; Piezoelectric films; Piezoelectric transducers; Space technology; Tensile stress; Acoustics; Computer-Aided Design; Equipment Design; Equipment Failure Analysis; Membranes, Artificial; Micro-Electrical-Mechanical Systems; Reproducibility of Results; Sensitivity and Specificity; Transducers;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
DOI :
10.1109/TUFFC.2009.1345
