Title :
High accuracy CMOS position-sensitive photodetector (PSD)
Author :
Makynen, A. ; Ruotsalainen, T. ; Kostamovaara, J.
Author_Institution :
Dept. of Electr. Eng., Oulu Univ., Finland
fDate :
1/16/1997 12:00:00 AM
Abstract :
A high-accuracy position-sensitive photodetector (PSD) for integrated sensor systems is presented. A 2-axis PSD composed of a dense array of vertical phototransistors and two arrays of polysilicon resistors was implemented using standard CMOS technology. Test results show better resolution and linearity as compared to a high-quality conventional PSD
Keywords :
CMOS integrated circuits; integrated optoelectronics; photodetectors; CMOS position-sensitive photodetector; integrated sensor; polysilicon resistor; vertical phototransistor;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19970083
