• DocumentCode
    1535743
  • Title

    High accuracy CMOS position-sensitive photodetector (PSD)

  • Author

    Makynen, A. ; Ruotsalainen, T. ; Kostamovaara, J.

  • Author_Institution
    Dept. of Electr. Eng., Oulu Univ., Finland
  • Volume
    33
  • Issue
    2
  • fYear
    1997
  • fDate
    1/16/1997 12:00:00 AM
  • Firstpage
    128
  • Lastpage
    130
  • Abstract
    A high-accuracy position-sensitive photodetector (PSD) for integrated sensor systems is presented. A 2-axis PSD composed of a dense array of vertical phototransistors and two arrays of polysilicon resistors was implemented using standard CMOS technology. Test results show better resolution and linearity as compared to a high-quality conventional PSD
  • Keywords
    CMOS integrated circuits; integrated optoelectronics; photodetectors; CMOS position-sensitive photodetector; integrated sensor; polysilicon resistor; vertical phototransistor;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19970083
  • Filename
    579423
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1535743