Title :
Structure and soft magnetic properties of Fe-N thin films
Author :
Zhou, Jian-ping ; Li, Dan ; Gu, You-Song ; Chang, Xiang-rong ; Zhao, Chun-sheng ; Li, Fu-Shen ; Qiao, Li-jie ; Tian, Zhong-zhuo ; Fang, Guang-Dan ; Song, Qing-Shan
Author_Institution :
Dept. of Mater. Phys., Beijing Univ. of Sci. & Technol., China
fDate :
9/1/2001 12:00:00 AM
Abstract :
200-nm Fe-N thin films deposited on glass substrates by radio-frequency magnetron sputtering were vacuum annealed at 250°C-350°C under a 12000-A/m magnetic field. Heat treatment was effective in improving the soft magnetic properties of the Fe-N film. When the nitrogen content was in the range of 5-7 atomic %, the thin films consisted of α´+α´´ after heat treatment and had excellent soft magnetic properties: Ms=2.4 T, Hc<80 A/m, μr=1500 under 2-10 MHz. The properties of the films meet the needs of a write head material used in dual-element giant magnetoresistive/inductive heads
Keywords :
annealing; coercive force; ferromagnetic materials; iron compounds; magnetic heads; magnetic permeability; magnetic thin films; soft magnetic materials; sputter deposition; sputtered coatings; 2 to 10 MHz; 200 nm; 250 to 350 C; ESCA; Fe-N; XRD; coercivity; dual-element GMR/GMI heads; film structure; magnetic permeability; phase composition; soft magnetic properties; sputtered thin films; vacuum annealed; write head material; Glass; Heat treatment; Magnetic films; Magnetic heads; Magnetic materials; Magnetic properties; Radio frequency; Soft magnetic materials; Sputtering; Substrates;
Journal_Title :
Magnetics, IEEE Transactions on
