Title :
Microsystems and I&M - mutual interest, demonstrated impact, and potential [Guest Editorial]
Author :
Wolffenbuttel, R.F.
Abstract :
Presents the guest editorial for this issue of the publication.
Keywords :
Chemical sensors; Chemical technology; Collaboration; Fabrication; Instrumentation and measurement; Instruments; Metrology; Micromechanical devices; Sensor systems; Silicon;
Journal_Title :
Instrumentation & Measurement Magazine, IEEE
DOI :
10.1109/MIM.2001.953452
