DocumentCode
1536940
Title
Temperature dependence of resonant frequency in all-fibre optically addressed silicon microresonator sensors
Author
Rao, Yun Jiang ; Walsh, Declan ; Uttamchandani, Deepak ; Culshaw, Brian
Author_Institution
Dept. of Electron. & Electr. Eng., Strathclyde Univ., Glasgow, UK
Volume
27
Issue
11
fYear
1991
fDate
5/23/1991 12:00:00 AM
Firstpage
934
Lastpage
936
Abstract
A compact sensor head for pressure and temperature measurements has been developed and demonstrated. The temperature dependence of resonance frequency in such a sensor system has been measured and analysed. It has been determined from the observed results that the additional thermal expansion of the substrate used to fix the silicon bridge results in a decrease of the overall temperature sensitivity of resonant frequency. The overall temperature coefficient of resonant frequency changes from a positive to a negative value and gradually reduces as temperature increases.
Keywords
electric sensing devices; elemental semiconductors; optical fibres; pressure measurement; resonators; silicon; temperature measurement; Si; compact sensor head; microresonator sensors; overall temperature coefficient; pressure measurement; resonant frequency; temperature measurements; temperature sensitivity; thermal expansion;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19910584
Filename
78101
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