Temperature dependence of resonant frequency in all-fibre optically addressed silicon microresonator sensors

A compact sensor head for pressure and temperature measurements has been developed and demonstrated. The temperature dependence of resonance frequency in such a sensor system has been measured and analysed. It has been determined from the observed results that the additional thermal expansion of the substrate used to fix the silicon bridge results in a decrease of the overall temperature sensitivity of resonant frequency. The overall temperature coefficient of resonant frequency changes from a positive to a negative value and gradually reduces as temperature increases.