DocumentCode :
1538132
Title :
Nano and micromechanical systems-fundamentals of nano and microengineering
Author :
Shea, John
Volume :
17
Issue :
5
fYear :
2001
Firstpage :
59
Lastpage :
59
Keywords :
Books; Equations; Fabrication; Knowledge engineering; Mathematical model; Micromechanical devices; Nanoelectromechanical systems; Physics; Polymer films; Power engineering and energy;
fLanguage :
English
Journal_Title :
Electrical Insulation Magazine, IEEE
Publisher :
ieee
ISSN :
0883-7554
Type :
jour
DOI :
10.1109/MEI.2001.954590
Filename :
954590
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1538132
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