DocumentCode :
1538522
Title :
Ion charge state distributions of alloy-cathode vacuum arc plasmas
Author :
Schülke, Thomas ; Anders, Andrè
Author_Institution :
Fraunhofer Resource Centre Michigan, Ann Arbor, MI, USA
Volume :
27
Issue :
4
fYear :
1999
fDate :
8/1/1999 12:00:00 AM
Firstpage :
911
Lastpage :
914
Abstract :
Ion charge state distributions (CSD´s) of alloy-cathode vacuum arc plasmas have been calculated under the assumption that thermodynamic equilibrium is valid in the vicinity of the cathode spot, and equilibrium CSD´s “freeze” when the plasma is rapidly expanding. In this way, experimental data of titanium-hafnium alloy-cathode plasmas have been simulated using a system of Saha equations generalized for multiple elements. It was found that the CSD´s of titanium and hafnium freeze approximately at the same plasma temperature and density. The freezing parameters depend slightly on the plasma composition. For the example considered, freezing occurs at temperature of T=3.0-3.8 eV and a total heavy particle density of order 1025m-3
Keywords :
plasma density; plasma temperature; plasma thermodynamics; plasma-wall interactions; vacuum arcs; 3.0 to 3.8 eV; Saha equations; Ti-Hf; Ti-Hf plasma; alloy-cathode vacuum arc plasmas; cathode spot; chopping current; freezing; ion charge state distributions; multiple elements; multiply charged ions; plasma composition; plasma density; plasma temperature; rapidly expanding plasma; thermodynamic equilibrium; titanium-hafnium alloy-cathode plasmas; total heavy particle density; Cathodes; Electrons; Equations; Ionization; Plasma density; Plasma materials processing; Plasma simulation; Plasma temperature; Plasma waves; Vacuum arcs;
fLanguage :
English
Journal_Title :
Plasma Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0093-3813
Type :
jour
DOI :
10.1109/27.782259
Filename :
782259
Link To Document :
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