Nanorobotic Assembly and Focused Ion Beam Processing of Nanotube-Enhanced AFM Probes

Author

Eichhorn, Volkmar ; Bartenwerfer, Malte ; Fatikow, Sergej

Author_Institution

Dept. of Comput. Sci., Univ. of Oldenburg, Oldenburg, Germany

Volume

9

Issue

4

fYear

2012

Firstpage

679

Lastpage

686

Abstract

In this paper, a focused ion beam processing technique is presented that facilitates the modification of carbon nanotubes (CNTs) in terms of length, diameter, and orientation. The CNTs are mounted onto an atomic force microscope (AFM) probe by using a nanorobotic microgripper-based pick-and-place handling strategy. Such CNT-enhanced AFM probes are needed for metrology measurements of nanostructures with critical dimensions and high aspect ratios. The complete process of assembly and processing is realized inside a nanorobotic dual beam scanning electron microscope (SEM) and focused ion beam (FIB) machine.

Keywords

atomic force microscopy; carbon nanotubes; focused ion beam technology; grippers; microrobots; milling; nanofabrication; nanophotonics; robotic assembly; spatial variables measurement; CNT; FIB milling; atomic force microscope; carbon nanotube; critical dimension metrology; focused ion beam processing; metrology measurement; nanoelectronic; nanofabrication; nanooptical; nanorobotic assembly; nanorobotic microgripper-based pick-and-place handling strategy; nanorobotic system; nanostructure; nanotube enhanced AFM probe; Atomic force microscopy; Carbon nanotubes; Grippers; Ion beams; Microassembly; Nanotechnology; Probes; Atomic force microscopy (AFM); focused ion beam (FIB); micro- and nanorobotics; nanotechnology; robotic micro- and nanoassembly;

fLanguage

English

Journal_Title

Automation Science and Engineering, IEEE Transactions on

Publisher

ieee

ISSN

1545-5955

Type

jour

DOI

10.1109/TASE.2012.2199753

Filename

6216459