Title :
Moderate energy metal ion beam focusing by a high-current plasma lens
Author :
Goncharov, Alexey A. ; Gubarev, Sergey M. ; Dobrovoiskii, A.N. ; Protsenko, Ivan M. ; Litovko, Irina V. ; Brown, Ian G.
Author_Institution :
Inst. of Phys., Acad. of Sci., Kiev, Ukraine
fDate :
8/1/1999 12:00:00 AM
Abstract :
Some features of the electrostatic plasma lens as applied to the focusing of moderate-energy, high-current, wide-aperture metal ion beams have been investigated and are described here. Static characteristics within the plasma lens volume have been explored. It is shown that when the potentials applied to the lens electrodes are held constant, the electric field increase with increasing ion beam current is limited by the increase of the potential in the paraxial region of the beam. Some estimates are made of the limiting static electric fields that can be obtained in the plasma lens, based on a quasi-neutral, two-component plasma model with anomalous electron mobility, where it is assumed that the anomalous mobility is caused by the absence of electron correlations when vortex-like structures appear in the hydrodynamically unstable plasma. The results of a theoretical analysis are compared with experimental data. Some results of experiments on the focusing of high-current, large area, heavy metal ion beams are also presented
Keywords :
electric field effects; electron mobility; focused ion beam technology; ion beams; plasma applications; plasma devices; anomalous electron mobility; electric field; electrostatic plasma lens; high-current plasma lens; high-current, large area, heavy metal ion beams; ion beam current; lens electrode; limiting static electric fields; moderate-energy high-current wide-aperture metal ion beams; moderate-energy metal ion beam focusing; paraxial region; plasma lens; plasma lens volume; potentials; quasi-neutral, two-component plasma model; vortex-like structures; Electrodes; Electron beams; Electron mobility; Hydrogen; Ion beams; Lenses; Magnetic fields; Particle beam optics; Plasma properties; Voltage control;
Journal_Title :
Plasma Science, IEEE Transactions on