• DocumentCode
    1538687
  • Title

    Moderate energy metal ion beam focusing by a high-current plasma lens

  • Author

    Goncharov, Alexey A. ; Gubarev, Sergey M. ; Dobrovoiskii, A.N. ; Protsenko, Ivan M. ; Litovko, Irina V. ; Brown, Ian G.

  • Author_Institution
    Inst. of Phys., Acad. of Sci., Kiev, Ukraine
  • Volume
    27
  • Issue
    4
  • fYear
    1999
  • fDate
    8/1/1999 12:00:00 AM
  • Firstpage
    1068
  • Lastpage
    1072
  • Abstract
    Some features of the electrostatic plasma lens as applied to the focusing of moderate-energy, high-current, wide-aperture metal ion beams have been investigated and are described here. Static characteristics within the plasma lens volume have been explored. It is shown that when the potentials applied to the lens electrodes are held constant, the electric field increase with increasing ion beam current is limited by the increase of the potential in the paraxial region of the beam. Some estimates are made of the limiting static electric fields that can be obtained in the plasma lens, based on a quasi-neutral, two-component plasma model with anomalous electron mobility, where it is assumed that the anomalous mobility is caused by the absence of electron correlations when vortex-like structures appear in the hydrodynamically unstable plasma. The results of a theoretical analysis are compared with experimental data. Some results of experiments on the focusing of high-current, large area, heavy metal ion beams are also presented
  • Keywords
    electric field effects; electron mobility; focused ion beam technology; ion beams; plasma applications; plasma devices; anomalous electron mobility; electric field; electrostatic plasma lens; high-current plasma lens; high-current, large area, heavy metal ion beams; ion beam current; lens electrode; limiting static electric fields; moderate-energy high-current wide-aperture metal ion beams; moderate-energy metal ion beam focusing; paraxial region; plasma lens; plasma lens volume; potentials; quasi-neutral, two-component plasma model; vortex-like structures; Electrodes; Electron beams; Electron mobility; Hydrogen; Ion beams; Lenses; Magnetic fields; Particle beam optics; Plasma properties; Voltage control;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/27.782283
  • Filename
    782283