Title :
Optimization of SrTiO/sub 3/ for applications in tunable resonant circuits
Author :
Treece, R.E. ; Thompson, J.B. ; Mueller, C.H. ; Rivkin, T. ; Cromar, M.W.
Author_Institution :
Superconducting Core Technol. Inc., Golden, CO, USA
fDate :
6/1/1997 12:00:00 AM
Abstract :
A series of SrTiO/sub 3/ (STO) films have been grown at a wide range of deposition conditions in order to determine the optimal growth parameters to maximize ferroelectric tuning while maintaining the lowest dielectric losses. The deposition pressure of the ambient O/sub 2/ (40 mTorr
Keywords :
circuit resonance; circuit tuning; dielectric losses; ferroelectric thin films; permittivity; pulsed laser deposition; strontium compounds; 1 MHz; 40 to 800 mtorr; 750 to 850 C; STO; SrTiO/sub 3/; X-ray diffraction; dielectric constant; dielectric loss tangent; ferroelectric film; lattice parameter; low frequency dielectric properties; pulsed laser deposition; strain; tunable resonant circuit; Dielectric losses; Dielectric measurements; Dielectric substrates; Ferroelectric films; Ferroelectric materials; Frequency; Lattices; Temperature; X-ray diffraction; X-ray scattering;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
