Title :
Fabrication and characteristics of vertically stacked NbCN/MgO/NbCN Josephson junctions with thin intermediate electrodes
Author :
Kikuchi, T. ; Kiryu, Syogo ; Kohjiro, S. ; Wang, Q. ; Shoji, A. ; Sato, S. ; Nagao, S.
Author_Institution :
Electrotech. Lab., Ibaraki, Japan
fDate :
6/1/1997 12:00:00 AM
Abstract :
Vertically stacked NbCN/MgO/NbCN Josephson junctions with thin intermediate electrodes (2 nm-11 nm) have been fabricated on a wafer in a computer-controlled sputtering. The tunneling characteristics of fabricated junctions have been evaluated as functions of the number of stacks and thickness of intermediate electrodes d. As a result, it has been found that the energy gap for intermediate electrodes reduced with d linearly depending on 1/d. The junction quality parameter R/sub SG//R/sub N/ gradually decreased with d.
Keywords :
Josephson effect; electrodes; magnesium compounds; niobium compounds; sputter deposition; superconducting energy gap; NbCN-MgO-NbCN; computer-controlled sputtering; energy gap; fabrication; intermediate electrode; quality parameter; tunneling characteristics; vertically stacked NbCN/MgO/NbCN Josephson junction; Counting circuits; Electrodes; Etching; Fabrication; Josephson junctions; Plasma applications; Silicon; Sputtering; Superconductivity; Voltage;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
