Improvement of the accuracy of 3-D electron trajectory calculations using both the finite element method and the boundary element method

Author

Sawada, Takeshi ; Yoneda, Ko

Author_Institution

Simulation Sci. Div., Canon Inc., Kanagawa, Japan

Volume

33

Issue

2

fYear

1997

fDate

3/1/1997 12:00:00 AM

Firstpage

1730

Lastpage

1735

Abstract

A new simulation method is presented to improve the accuracy of 3-D electron trajectory calculations with the space charge effect, using both the finite element method and boundary element method to calculate the electric field and the magnetic field. In this method, the magnetic potential is first calculated by the finite element method, then calculated again by the boundary element method, and finally the magnetic field is calculated at the nodes and interpolated in the finite elements. Next, the electric field is calculated in the same manner used for the magnetic field. This method was specifically designed for the electron focusing system of an electron beam apparatus

Keywords

boundary-elements methods; electric fields; electron beam focusing; electron beam lithography; finite element analysis; magnetic fields; 3D electron trajectory calculations; accuracy; boundary element method; electric field; electron beam apparatus; electron beam lithography devices; electron focusing system; finite element method; interpolation; magnetic field; magnetic potential; simulation method; space charge effect; Accuracy; Boundary element methods; Electron beams; Electron emission; Finite difference methods; Finite element methods; Integral equations; Lenses; Magnetic fields; Shape control;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.582607

Filename

582607