Title :
Fabrication of HTS Josephson junctions on substrates prepared by focused ion beam system
Author :
Jin, I. ; Chen, C.-H. ; Pai, S.P. ; Ming, B. ; Kang, D.J. ; Venkatesan, T. ; Machalett, F. ; Edinger, K. ; Orloff, J. ; Melngailis, J.
Author_Institution :
Center for Supercond. Res., Maryland Univ., College Park, MD, USA
fDate :
6/1/1999 12:00:00 AM
Abstract :
YBCO Josephson junctions were fabricated by using a Focused Ion Beam (FIB) of 20-nm diameter gallium ion beam. We first made trenches of 100-nm width and 300-nm depth on LaAlO/sub 3/ (LAO) substrates that were covered by 100-nm chromium (Cr) conducting layer. After removing the conducting layer by chemical etching, YBCO followed by a gold layer was pulsed laser deposited in-situ. The deposited YBCO was disconnected over the trenches and the gold layer filled the trenches and made connections between the separated YBCO so that it formed SNS junctions. We observed proximity coupling up to 86 K.
Keywords :
Josephson effect; barium compounds; focused ion beam technology; high-temperature superconductors; proximity effect (superconductivity); pulsed laser deposition; superconducting thin films; superconductor-normal-superconductor devices; yttrium compounds; 100 nm; 86 K; Cr covered LaAlO/sub 3/ substrates; FIB milling; FIB system prepared substrates; HTSC Josephson junctions; LaAlO/sub 3/; SNS junctions; Shapiro steps; YBaCuO; chemical etching; fabrication; in situ pulsed laser deposited; proximity coupling; trenches; Chemical lasers; Chromium; Etching; Fabrication; Gold; High temperature superconductors; Ion beams; Josephson junctions; Pulsed laser deposition; Yttrium barium copper oxide;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
