Title :
Localization length of integrated multi-walled carbon nanotubes
Author :
Fiedler, Holger ; Hermann, Simon ; Rennau, Michael ; Schulz, Stefan E. ; Gessner, T.
Author_Institution :
Center for Microtechnologies (ZFM), Tech. Univ. Chemnitz, Chemnitz, Germany
Abstract :
We prepared CNT based vias on wafer scale. Based on the electrical characterization we extracted the localization length of the CNTs. While for short CNTs the classical transport regime is valid, the Anderson localization regime applies for longer CNTs. Supplementary the characteristic length scales were estimated based on the structure of the CNTs being in good agreement with the parameters extracted from the electrical measurements.
Keywords :
Anderson model; carbon nanotubes; integrated circuit interconnections; Anderson localization regime; C; CNT based vias; integrated multiwalled carbon nanotubes; localization length; Carbon nanotubes; Electrical resistance measurement; Integrated circuit interconnections; Materials; Resistance; Semiconductor device measurement;
Conference_Titel :
Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC), 2014 IEEE International
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-4799-5016-4
DOI :
10.1109/IITC.2014.6831852
